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Confidential · Foundry & Partner Access

GALAXY PADP — foundry submission package

PADP Rev B2 foundry submission materials — layer stack, device library, split-fab assembly, and intake gates. Proposal-grade; not a mask order or GDS portal package. Enter the access password to continue.

Confidential · Foundry Chip Docs · PADP Rev B2

GALAXY — Foundry PADP

First full-reticle STAR-PHASER chip at d=16: 50 GHz comb, 16-bin AWG network, first AlGaAs MTP rehearsal cells, and QUASAR-transition prototype features on a single 5×10 mm die.

d=16 GF(2⁴) STAR-PHASER Region I (Q < 0.2) Today-feasible

Foundry posture: Immediate engagement packet. Source corpus: Foundry Chip Docs/GALAXY/ — five PADP volumes + R01–R25 research memos + GALAXY-PADP-ROLLUP.md. Cross-chip context: 00-CROSS-CHIP-ROLLUP.md.

Chip identity

Platform summary

Die / reticle

5 × 10 mm full reticle

Tiles: 1

Power · package

~1 W

CQFP / LTCC

Readout

Detection stack

16-ch SPAD

F-X01F-X01
F-X01. 5×10 mm reticle floorplan — AWG16 + MTP rehearsal sites placeholder · Rev B2
F-X02F-X02
F-X02. AlGaAs micro-transfer-print coupon placement on SiN bus placeholder · Rev B2
Parts · Vol II

Layer stack & materials

Shared L0–L11 platform across all eight PADPs — Si₃N₄ backbone, TFLN control, As₂S₃ LoCA BEOL (<210°C golden rule), optional AlGaAs MTP.

LayerDescription
L0–L7AN350 damascene SiN on 5×10 mm reticle
L8TFLN control plane — scaled RF bus (8-tone harmonic)
L10Sparse As₂S₃ LoCA + 2–3 AlGaAs MTP rehearsal sites
StackStack
Layer stack cross-section. L0–L11 material stack for GALAXY. placeholder
Parts · Vol III

Device library

On-chip component inventory — status labels per R25 honesty audit.

DeviceSpecificationStatus
AWG network16-ch demux/mux; AIM AWGR-class footprintdesigned/target
AlGaAs MTP2–3 rehearsal nonlinear cells via micro-transfer printto-be-tested
Comb / encoder50 GHz grid; B_comb ≈ 750 GHzdesigned/target
OPC cellsSparse LoCA — 2–3 sitesclaim
ChiL calibration~240 directed phase pairsdesigned/target
Detectors16-ch warm SPAD arraydesigned/target
Assembly · R19

Split-fab phases & assembly

Ligentec FEOL → QLT TFLN bond → arsenic-isolated As₂S₃ BEOL → hermetic package. Foundry never sees arsenic, LN donor recipes, or full OPC geometry.

Phase A

LIGENTEC AN350

L0–L7 Si₃N₄ FEOL

QC: Gate 0 DRC/LVS/MRC pre-tapeout

→ Planarized wafer or diced dies

Phase B

QLT bond bay

L8 TFLN ion-cut bond ≤500°C

QC: Gate 1B bond yield + adiabatic IL

→ 18+ EO sites bonded

Phase C

QLT arsenic BEOL

L9 metal + L10 As₂S₃ <210°C

QC: Gate 2 OPC G≥+2 dB classical

→ Processed dies with LoCA fill

Phase D

QLT assembly

Dice · fiber · SPAD · seal

QC: Gate 3 packaged acceptance

→ Hermetic module + test report

GALAXY-specific assembly notes

First AlGaAs MTP integration on reticle-scale die. Passive cooling sufficient. LoCA windows populated at foundry; nonlinear fill at QLT BEOL.

AssemblyAssembly
Assembly flow. Split-fab cut line and package integration for GALAXY. placeholder
Foundry instructions · Vol IV

Foundry requirements & intake gates

What the foundry receives vs. what QLT retains. Partial GDS via encrypted transport.

ItemRequirement / status
PrimaryLIGENTEC AN350 full reticle
Near-term engagementListed in immediate foundry packet with GEMINI/TETRIS/NOVA
MTPAlGaAs coupon route R2 fallback if blanket MTP yield low
DRCReticle fill rules — MRC density audit required
GatesGate 0 partial GDS + LoCA coupon TST-LoCA

Campaign intake gates (all chips)

GateRequirementStatus
Intake checklist00-FOUNDRY-INTAKE-CHECKLIST.md completed per chip/foundryOpen
NDA / PDKDKLA executed; active rule deck downloaded and versionedOpen
Gate 0Partial-GDS export, DRC/LVS, Q-layer strip audit, SHA-256 hashOpen
Wafer probe / KGDPer-die disposition traveler (mandatory NOVA+)Open / N/A
Package ICDFiber, electrical, thermal, mechanical interfaces as drawingsOpen
ATP / OQCAcceptance matrix, soak, fiber pull, hermetic/leak testsOpen
Foundry acceptanceModule order, waiver list, COA format, quote in writingOpen
Foundry question register

Open items FQ-01–FQ-08 centralized in 00-FOUNDRY-INTAKE-CHECKLIST.md §9. PDK assumption freeze (AN350/AN800 layer integers, LoCA limits, CD/overlay) is a hard hold before GDS upload. Partial-GDS boundary must be DRC-debuggable without releasing withheld As₂S₃/TFLN/AlGaAs/control maps.

PADP package index

Five-volume structure

Full specs in Foundry Chip Docs/GALAXY/QLT-GALAXY-PADP-Vol-*

VolumeTitleResearch memos
Vol ISystem ArchitectureR01–R04 · blocks, encoding, I/O, power/thermal/package
Vol IIPhysical ArchitectureR05–R09 · layer stack, TFLN, LoCA, floorplan, thermal/electrical
Vol IIIDevice LibraryR10–R16 · rings, AWG, mesh, couplers, modulators, OPC, detectors
Vol IVFoundry RequirementsR17–R20 · Ligentec/AIM matrix, custom modules, DRC/IP
Vol VSimulation & Tape-OutR21–R25 · sim plans, GDS roadmap, honesty audit
Simulation · Vol V

Tape-out readiness & honesty audit

Rev B2 status — proposal-grade

X1 AWG scaling, X2 AlGaAs MTP, X3 encoder fidelity — schematic figures only.

No fabricated simulation results are claimed in Vol V — all campaigns status=planned. No GDS beyond v0.1 heritage layouts. No foundry DRC signoff. Promotion path requires closing gates in GALAXY-PADP-ROLLUP.md.

F-X03F-X03
F-X03. 16-channel AWG scaling and crosstalk budget placeholder · Rev B2
F-X04F-X04
F-X04. Split-fab cut line at L7 CMP with LoCA windows placeholder · Rev B2
Related pages

Cross-links

Product

GALAXY product ref

Customer-facing architecture and competitive positioning.

Manufacturing

GALAXY fab path

Equipment, process traveler, and in-house BEOL steps.

Campaign

Chip lineup

8-chip dimension ladder and QUASAR framework context.

Source corpus

Foundry Chip Docs · Rev B2

On-disk package: Foundry Chip Docs/GALAXY/ · Bundle: _export/QLT-PADP-RevB2-2026-06-11.zip