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Step 06 Singulation & Packaging

Wedge Wire Bonder

$500 (outsource prototype) → $12,000 (used bonder for production) = $12,500 total HIGH ● Required for all 48–72 electrical connections (heaters, SPADs, power, ground)

Role in QLT Fabrication

Gold or aluminum wire bonding connects chip bond pads to ceramic/PCB package leads. This is the critical step that establishes all electrical connectivity to:

  • 48 thermo-optic phase heater pads ● individually addressed for mesh reconfigurability
  • 16 SPAD detector output pads ● high-speed signal path to readout electronics
  • 8 ground/power pads ● common supply and return
  • Total: ~72 wire bonds per chip

Bond Types Used at QLT

Bond TypeWirePad MaterialMethodQLT Use Case
Wedge-wedge (Al)25 μm Al wireAl or Au padsUltrasonic + pressure at room tempPrimary method ● no heat to chip
Ball-wedge (Au)25 μm Au wireAu padsThermosonic (heat 130–200°C + US)If Au pads specified
Ribbon2 mil Al ribbonLow-inductance applicationsUltrasonicNot needed for QLT

Bond Requirements

ParameterTarget
Pad size (chip)100–200 × 100–200 μm
Pad size (package)1 mm × 1 mm
Wire diameter25 μm (1 mil) Al or Au
Loop height< 500 μm (to fit under package lid)
Bond pitch200 μm minimum
Pull strength> 3 gf (per MIL-STD-883 Method 2011)
Shear strength> 6 gf (per MIL-STD-883 Method 2019)
Bonds per chip~72
Time per chip30–60 min (manual); 5–10 min (semi-auto)

Recommended Configuration

ParameterSpecification
ManufacturerWest Bond Inc., Anaheim, CA
Model7476D (45° feed) / 7600D (90° deep access)
TypeManual wedge-wedge bonder
Wire typesAl, Au wire: 0.7–2.0 mil (17–50 μm); Au ribbon to 1×10 mil
Bonding mechanismUltrasonic (K~Sine 63 kHz transducer, 5 W)
Bond force range10–150 grams, adjustable
Heated stageRadiant tool heat built-in (up to ~200°C for Au thermosonic)
MicroscopeUser-selected; Nikon SMZ-660 recommended (not included)
Stage travelManual XYZ single-lever micromanipulator, 8:1 ratio
Z encoder resolution0.001 inch
ESD protectionElectroless nickel plating; suitable for ESD-sensitive devices
Programming68000 microprocessor; 3 device buffers, 21 stitch bonds per wire
Display4-line, 40-character LCD
Power115 VAC, 50/60 Hz, 4A
Dimensions22 × 19 × 12 inches (56 × 48 × 30 cm)
Weight60 lbs (27 kg) uncrated
Price (new)$18,000–$25,000 (contact West Bond for quote)
Price (refurbished)$17,500–$18,000 (7476E model on eBay/Bridge Tronic)
Delivery (new)4–8 weeks
Contactwestbond.com(714) 978-1551[email protected]
ParameterTarget
Pad size (chip)100–200 × 100–200 μm
Pad size (package)1 mm × 1 mm
Wire diameter25 μm (1 mil) Al or Au
Loop height< 500 μm (to fit under package lid)
Bond pitch200 μm minimum
Pull strength> 3 gf (per MIL-STD-883 Method 2011)
Shear strength> 6 gf (per MIL-STD-883 Method 2019)
Bonds per chip~72
Time per chip30–60 min (manual); 5–10 min (semi-auto)
ParameterSpecification
ManufacturerWest Bond Inc., Anaheim, CA
Model7476D (45° feed) / 7600D (90° deep access)
TypeManual wedge-wedge bonder
Wire typesAl, Au wire: 0.7–2.0 mil (17–50 μm); Au ribbon to 1×10 mil
Bonding mechanismUltrasonic (K~Sine 63 kHz transducer, 5 W)
Bond force range10–150 grams, adjustable
Heated stageRadiant tool heat built-in (up to ~200°C for Au thermosonic)
MicroscopeUser-selected; Nikon SMZ-660 recommended (not included)
Stage travelManual XYZ single-lever micromanipulator, 8:1 ratio
Z encoder resolution0.001 inch
ESD protectionElectroless nickel plating; suitable for ESD-sensitive devices
Programming68000 microprocessor; 3 device buffers, 21 stitch bonds per wire
Display4-line, 40-character LCD
Power115 VAC, 50/60 Hz, 4A
Dimensions22 × 19 × 12 inches (56 × 48 × 30 cm)
Weight60 lbs (27 kg) uncrated
Price (new)$18,000–$25,000 (contact West Bond for quote)
Price (refurbished)$17,500–$18,000 (7476E model on eBay/Bridge Tronic)
Delivery (new)4–8 weeks
Contactwestbond.com(714) 978-1551[email protected]
ParameterK&S 4523 (Wedge)K&S 4524AD (Ball)K&S 4526 (Wedge)
TypeManual wedge bonderSemi-auto ball bonderAuto-stepback wedge
Wire0.7–3.0 mil Al/Au1.3 mil Au (ball-wedge)25 μm Al or Au
Stage tempHeated work holderUp to 250°CUp to 125°C
Bond time10–120 ms (std) / 1000 ms (long)Programmable10–1000 ms selectable
FeaturesIndividual bond parametersNEFO ball control, 200 programsAuto stepback, loop control
Price (used)$7,000–$20,000$8,000–$12,000$10,000–$15,000
AvailabilityExcellent used marketGood used marketGood used market
SourceseBay, LabX, AllTesteBay, wotol.comNIST uses this model

Process Integration

Pre-Bond Preparation

  • Clean chip pads: O₂ plasma ash (30 s, 100 W) to remove organic residue from pads
  • Inspect pads: Verify pad metallization integrity under microscope (no peeling, cracking)
  • Mount chip: Epoxy die-bond chip to ceramic package or PCB carrier using die bonder (#08-Die-Bonder)
  • Cure die attach: 150°C, 30 min (or UV cure if using UV epoxy)
  • Load wire: Thread 25 μm Al wire through bonder clamp and wedge tool
  • Set parameters: US power = 200 mW, force = 25 g, time = 30 ms (starting recipe for Al on Au pads)

Bond Cycle (per wire)

  • Lower wedge tool to chip pad ● first bond (ultrasonic weld)
  • Raise tool, feed wire to form loop (100–500 μm height)
  • Lower to package pad ● second bond (ultrasonic weld)
  • Clamp and tear wire
  • Move to next pad ● repeat 72 times per chip

Post-Bond Inspection

  • Visual inspection: 100% bonds under 50× microscope
  • Pull test: Sample 5 bonds per chip ● pull > 3 gf pass (MIL-STD-883 Method 2011)
  • Shear test: Sample 3 bonds per chip ● shear > 6 gf pass
  • Electrical continuity: Verify all 72 connections with probe station

Vendor Options & Pricing

ModelManufacturerTypePrice (New)Price (Used/Refurb)DeliverySource
West Bond 7476DWest Bond (Anaheim, CA)Manual wedge$18,000–$25,000$17,500–$18,0004–8 weekswestbond.com
West Bond 7476EWest BondManual wedge (updated)$20,000–$28,000$17,500–$18,0004–8 weekseBay, Bridge Tronic
K&S 4523Kulicke & Soffa (PA)Manual wedgeDiscontinued (legacy)$7,000–$20,0001–3 weekseBay, wotol.com
K&S 4524ADKulicke & SoffaSemi-auto ballDiscontinued (legacy)$8,000–$12,0001–3 weekseBay, AllTest
K&S 4526Kulicke & SoffaAuto-stepback wedgeDiscontinued (legacy)$10,000–$15,0001–3 weekseBay, LabX
TPT HB10TPT (Germany)Semi-auto, auto Z$15,000–$22,0004–8 weekstpt-wirebonder.com
TPT HB16TPT (Germany)Semi-auto, motor Z+Y$20,000–$30,0004–8 weekstpt-wirebonder.com
F&K Delvotec 56XXF&K Delvotec (Germany)Semi-auto wedge$25,000–$45,000$15,000–$30,0004–8 weeksfkdelvotec.com
Hesse Mech-ELHesse (Germany)Semi-auto$30,000–$60,000$15,000–$30,0006–12 weekshfrequency.com
OutsourceSPT Micro, Palomar, PromexService$5–$15/chip1–2 weeks/batchVarious

Facility Requirements

ParameterSpecification
Power115 VAC, 50/60 Hz, 4A (standard outlet)
Compressed gasN₂ or forming gas at 60 PSIG for ball bonding flame-off (Au wire only)
VibrationCRITICAL ● vibration-isolated bench required (Newport, TMC, or Minus K)
Temperature22 ± 2°C (standard lab)
Humidity40–60% RH (prevent static; too dry = ESD risk)
CleanlinessClean area; particles on pads cause bond failures
Floor space0.6 × 0.5 m (benchtop unit)
Weight27 kg ● standard lab bench is sufficient
ExhaustNone required (no hazardous gases)
WaterNone required
Microscope lightingSeparate LED ring light or Luxuray 21-LED illuminator
ESDESD-safe workstation: wrist strap, mat, grounded bench

Safety & Handling

HazardRisk LevelMitigation
ESD damage to chipHIGHESD wrist strap, conductive mat, grounded bonder chassis
UV from plasma cleanLOWUV goggles during O₂ plasma pad cleaning step
Wire handlingLOW25 μm wire is fragile ● handle spools with care
Microscope eye strainMEDIUMLimit continuous bonding sessions to 2 hours; use camera + monitor
Repetitive stressMEDIUMErgonomic seating; alternate operators for long bonding runs
Hot stage burns (Au bonding)LOW–MEDIUMStage can reach 200°C ● warning label, cool-down protocol
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