Safety & Security Systems

Role in QLT Fabrication

Safety and security infrastructure is the non-negotiable foundation of any semiconductor fabrication facility. QLT's quantum photonic chip fabrication process uses pyrophoric gases (SiH₄), extremely toxic gases (HF byproducts from CHF₃ etching), corrosive precursors (TiCl₄, HCl), and cryogenic liquids (LN₂) — all of which demand purpose-built detection, suppression, and containment systems that meet or exceed OSHA, NFPA, and SEMI safety standards.

Beyond chemical safety, QLT's work on quantum photonic processors falls under ITAR/EAR export control (proposed ECCN 3A090.b), requiring CMMC Level 2 physical security: controlled facility access, CCTV surveillance, visitor escort policies, and secure data handling. The safety and security systems described here are not optional add-ons — they are regulatory prerequisites for operating process tools and maintaining defense-eligible facility classification.

The safety and security infrastructure serves multiple critical functions:

• Gas monitoring ● continuous real-time detection of toxic and combustible gases (SiH₄, HF, HCl, NH₃, CHF₃ byproducts) with automatic equipment interlocks and facility alarm
• Fire suppression ● FM-200 (HFC-227ea) clean-agent suppression for electronics and cleanroom areas; wet sprinkler for gas cabinet zones; CO₂ for electrical rooms
• Respiratory protection ● self-contained breathing apparatus (SCBA) stations for emergency response; air-purifying respirators (APR) for routine maintenance
• CCTV surveillance ● IP camera coverage of all fab areas, gas storage, entrances, and server room; 90-day retention; ITAR-compliant recording
• Access control ● card + PIN entry at all facility perimeters; biometric option for sensitive areas; ITAR visitor escort enforcement
• EHS management ● environmental health and safety program covering chemical hygiene, exposure monitoring, training records, and incident investigation
• ITAR-compliant zones ● physically delineated controlled areas with access restrictions for foreign nationals; separate from visitor-accessible spaces

Why Comprehensive Safety Is Non-Negotiable

QLT's fabrication process includes several of the most hazardous materials in semiconductor manufacturing. A single SiH₄ leak can cause an invisible flame that auto-ignites on contact with air. HF exposure at concentrations as low as 50 ppm can be fatal within minutes. These hazards require a layered safety approach: prevention (engineering controls), detection (continuous monitoring), suppression (automated response), and response (emergency procedures and PPE).

Technical Specifications

Gas Detection & Monitoring System

Gas Detection System Architecture

Fire Suppression Systems

FM-200 Clean Agent System Specifications

System Architecture

QLT SAFETY & SECURITY SYSTEM ARCHITECTURE:

┌─────────────────────────────────────────────────────────────┐
│                FIRE ALARM CONTROL PANEL (FACP)               │
│           Honeywell Notifier NFS2-3030 or Siemens FC726     │
│                                                              │
│  INPUTS:                        OUTPUTS:                     │
│  ├── VESDA aspirating detectors ├── FM-200 discharge (clean) │
│  ├── Smoke detectors (I/P)      ├── Sprinkler valve release  │
│  ├── UV/IR flame detectors      ├── Audible/visual alarms    │
│  ├── Manual pull stations       ├── HVAC shutdown relay       │
│  ├── Flow/tamper switches       ├── Door release (mag locks)  │
│  └── Gas detection controller   ├── Elevator recall           │
│      (Honeywell/MSA)            ├── Fire dept notification    │
│                                 └── BMS/MES alarm forwarding  │
├─────────────────────────────────────────────────────────────┤
│                GAS DETECTION CONTROLLER                       │
│           Honeywell Touchpoint Plus (32-channel)             │
│                                                              │
│  ├── SiH₄ sensor (gas cabinet) ──→ Auto-shutoff valve       │
│  ├── HF sensor (RIE exhaust)   ──→ Tool EMO interlock       │
│  ├── HCl sensor (ALD area)     ──→ Exhaust fan boost        │
│  ├── NH₃ sensor (ALD area)     ──→ Audible/visual alarm     │
│  ├── O₂ sensor (N₂ storage)    ──→ Room evacuation alarm    │
│  ├── CO sensor (scrubber area)  ──→ Ventilation alarm        │
│  └── All channels → 4-20 mA → SCADA/BMS → MES logging      │
├─────────────────────────────────────────────────────────────┤
│                ACCESS CONTROL SYSTEM                         │
│           Lenel OnGuard or HID SIGNO                         │
│                                                              │
│  ├── Perimeter: card + PIN (all employees)                   │
│  ├── Cleanroom: card + PIN (trained personnel only)          │
│  ├── Server room: card + PIN + optional biometric            │
│  ├── ITAR zone: card + PIN; foreign national restriction     │
│  ├── Gas storage: card + PIN (authorized technicians only)   │
│  ├── Visitor: escorted access only; temp badge; NDA logged   │
│  └── All events → access log → 1-year retention (ITAR)      │
├─────────────────────────────────────────────────────────────┤
│                CCTV / VIDEO SURVEILLANCE                     │
│           Axis P3265-V (indoor) / Q6135-LE (PTZ)            │
│                                                              │
│  ├── All entrances/exits (4 cameras minimum)                 │
│  ├── Cleanroom interior (2–4 fixed dome)                     │
│  ├── Gas storage / chemical storage (2 cameras)              │
│  ├── Server room (1 camera)                                  │
│  ├── Loading dock (1 PTZ camera)                             │
│  ├── Parking / perimeter (2–4 cameras)                       │
│  ├── NVR: 90-day retention; 4K resolution; H.265 compression│
│  └── Remote viewing via VPN for security personnel           │
└─────────────────────────────────────────────────────────────┘

ITAR Physical Security Requirements

ITAR / CMMC LEVEL 2 PHYSICAL SECURITY (NIST 800-171):

CONTROLLED AREA REQUIREMENTS:
├── Physical perimeter with controlled entry points
├── Badge + PIN access at all entry points
├── Visitor sign-in log with escort assignment
├── Foreign national access restrictions (ITAR)
│   ├── U.S. persons only in ITAR-controlled zones
│   ├── Visitor escort required at all times
│   └── No photography or electronic devices in controlled areas
├── Access logs retained for minimum 1 year
└── Annual access audit and review

CLEAN DESK / CLEAN SCREEN POLICY:
├── No GDS files, process recipes, or yield data left visible
├── Workstation auto-lock after 5 minutes idle
├── Secure print release (badge-at-printer)
└── Shred bins for controlled documents

INCIDENT RESPONSE:
├── Unauthorized access → security notification within 15 min
├── Tailgating detection → anti-passback on access readers
├── After-hours intrusion → alarm to monitoring service + police
└── All security events documented and reviewed quarterly

Vendor Options & Pricing

Gas Detection Systems

Fire Suppression Systems

Access Control & CCTV

Total Safety & Security Budget

Facility Requirements

Safety & Handling

Hazard Summary — QLT Fab Operations

Emergency Procedures

QLT EMERGENCY RESPONSE PROCEDURES:

GAS LEAK (SiH₄, HF, HCl, NH₃):
├── 1. EVACUATE immediately ● do NOT attempt to close valves in gas plume
├── 2. Pull emergency shut-off (EMO) if accessible WITHOUT entering plume
├── 3. Activate building fire alarm if not already triggered
├── 4. Call 911 and facility emergency number
├── 5. Account for all personnel at assembly point
├── 6. Do NOT re-enter until gas monitoring shows all-clear
├── 7. SiH₄ burns with INVISIBLE FLAME ● assume fire if hissing heard
└── 8. Provide gas type and SDS to first responders

FIRE IN CLEANROOM:
├── 1. Activate fire alarm pull station
├── 2. Evacuate via nearest exit; close doors behind you
├── 3. FM-200 system will discharge automatically after 30-second countdown
├── 4. Do NOT re-enter during FM-200 discharge or hold period
├── 5. Fire department has override for suppression hold
└── 6. Post-discharge: ventilate area before re-entry

HF SKIN EXPOSURE:
├── 1. IMMEDIATELY flood affected area with water for 5 minutes
├── 2. Apply 2.5% calcium gluconate gel generously while flushing
├── 3. Call 911 ● HF exposure is a MEDICAL EMERGENCY
├── 4. Continue calcium gluconate application until EMS arrives
├── 5. HF can penetrate skin and cause deep tissue/bone damage
│      with delayed symptoms (hours) ● treat even if pain-free
└── 6. Provide HF concentration and exposure duration to EMS

OXYGEN DEPLETION (O₂ MONITOR ALARM):
├── 1. EVACUATE room immediately ● do not attempt rescue in O₂-depleted area
├── 2. Close door to prevent N₂ spread
├── 3. Call 911 if anyone is unresponsive
├── 4. Rescuers MUST use SCBA before entering O₂-depleted area
├── 5. Begin CPR if victim is not breathing (move to fresh air first)
└── 6. Do NOT re-enter until O₂ monitor shows ≥ 19.5%

SECURITY BREACH (UNAUTHORIZED ACCESS):
├── 1. Challenge unknown individuals; ask for badge
├── 2. Contact security/management immediately
├── 3. Do NOT physically confront
├── 4. Note description, time, location
├── 5. Review CCTV footage
└── 6. File incident report per ITAR security plan

EHS Program Requirements