Power & UPS System

Role in QLT Fabrication

Semiconductor fabrication equipment is extraordinarily sensitive to power quality. A voltage sag lasting just 100 milliseconds — imperceptible to humans — can crash a DUV stepper mid-exposure (ruining a $12,000 reticle), quench an ICP-RIE plasma (destroying an in-process wafer), or corrupt FPGA firmware on the control electronics. The power and UPS system provides clean, uninterrupted electricity to the entire QLT facility, protecting over $80M in equipment and irreplaceable in-process material.

The power system addresses multiple failure modes simultaneously:

• Voltage sags ● 80–90% of all power quality events; caused by grid switching, motor starts, lightning; the UPS absorbs sags instantly with zero transfer time
• Complete outages ● utility loss triggers automatic transfer to generator within 10 seconds; UPS bridges the gap with battery power
• Frequency deviation ● sensitive RF generators (13.56 MHz for PECVD/RIE) require 60.00 Hz ±0.5%; the UPS synthesizes clean output regardless of input quality
• Harmonic distortion ● variable-frequency drives, rectifiers, and switching supplies on the grid inject harmonics (THD > 5%); double-conversion UPS outputs clean sine wave with < 3% THD
• Transients and spikes ● lightning, capacitor bank switching; UPS and surge protection devices clamp transients to safe levels
• Ground noise ● sensitive analog instruments (ellipsometer, SEM detectors, SPADs) require isolated clean ground; dedicated technical ground system eliminates ground loops

Equipment Power Sensitivity

Technical Specifications

Power Distribution Architecture

QLT POWER SYSTEM SINGLE-LINE DIAGRAM:

UTILITY FEED A ─────┐                    ┌───── UTILITY FEED B
(480V, 3φ, 800A)    │                    │    (480V, 3φ, 800A)
                     ▼                    ▼
              ┌──────────────────────────────────┐
              │     AUTOMATIC TRANSFER SWITCH     │
              │        (ATS, 800A, 480V)          │
              │   Transfer time: < 100 ms         │
              │   Preferred: Feed A               │
              └──────────┬───────────────────────┘
                         │
              ┌──────────▼───────────────────────┐
              │     MAIN DISTRIBUTION PANEL       │
              │        (MDP, 800A, 480V)          │
              │   Metering, surge protection      │
              └──────────┬───────────────────────┘
                         │
         ┌───────────────┼───────────────────┐
         │               │                   │
         ▼               ▼                   ▼
   ┌───────────┐  ┌────────────┐  ┌──────────────┐
   │ UPS BUS   │  │ GENERATOR  │  │ MECHANICAL   │
   │ 500 kVA   │  │ BUS        │  │ LOADS        │
   │ 480V→208V │  │ (ATS #2)   │  │ (direct)     │
   └─────┬─────┘  └─────┬──────┘  └──────┬───────┘
         │              │               │
         ▼              ▼               ▼
  Critical loads   HVAC, pumps,    Lighting,
  (all process     exhaust fans,   receptacles,
   equipment)      chillers        non-critical

UPS System Specifications

Generator System Specifications

Power Quality Requirements

Process Integration

QLT POWER DISTRIBUTION ● LOAD SCHEDULE:

UPS-PROTECTED LOADS (500 kVA total capacity):
├── PANEL UPS-A: Lithography Bay (150 kVA)
│   ├── DUV stepper: 50 kVA, 480V → step-down transformer
│   ├── Contact aligner: 5 kVA, 208V
│   ├── Spin coater: 3 kVA, 208V
│   ├── E-beam writer: 40 kVA, 208V
│   └── Reserved: 52 kVA
│
├── PANEL UPS-B: Deposition & Etch Bay (150 kVA)
│   ├── ICP-RIE: 15 kVA, 208V (3-phase)
│   ├── PECVD: 12 kVA, 208V (3-phase)
│   ├── E-beam evaporator: 25 kVA, 208V (3-phase)
│   ├── Sputtering system: 20 kVA, 208V (3-phase)
│   ├── Thermal evaporator: 8 kVA, 208V
│   └── Reserved: 70 kVA
│
├── PANEL UPS-C: Metrology & Control (100 kVA)
│   ├── SEM (DualBeam): 12 kVA, 208V
│   ├── Ellipsometer: 2 kVA, 120V
│   ├── AFM: 2 kVA, 120V
│   ├── FPGA control rack: 3 kVA, 120V
│   ├── Gas monitors (SiH₄, HF): 2 kVA, 120V (LIFE SAFETY)
│   ├── BAS/BMS controls: 3 kVA, 120V
│   └── Reserved: 76 kVA
│
└── PANEL UPS-D: Packaging & Test (100 kVA)
    ├── Wire bonder: 5 kVA, 208V
    ├── Die bonder: 8 kVA, 208V
    ├── Fiber alignment station: 3 kVA, 120V
    ├── Optical test stations (×4): 8 kVA, 120V
    └── Reserved: 76 kVA

GENERATOR-BACKED LOADS (non-UPS, via ATS #2):
├── HVAC supply fans: 100 kVA
├── Exhaust fans: 50 kVA
├── Chiller: 80 kVA
├── DI water system: 15 kVA
├── Lighting (emergency): 10 kVA
├── Compressed air: 20 kVA
└── Fire alarm / suppression: 5 kVA

NON-PROTECTED LOADS (utility only):
├── General lighting: 30 kVA
├── Office HVAC: 40 kVA
├── Receptacles (non-lab): 20 kVA
└── Domestic water heating: 15 kVA

Vendor Options & Pricing

UPS System Vendors

Generator Vendors

Total System Cost Breakdown

Facility Requirements

Space and Infrastructure

Annual Operating Costs

Safety & Handling

Hazard Summary

Emergency Procedures

POWER SYSTEM EMERGENCY RESPONSE:

UTILITY POWER FAILURE:
├── ATS detects loss within 2 seconds
├── Generator auto-starts (cold start < 10 seconds)
├── UPS batteries carry all critical loads during transfer gap
├── ATS transfers to generator at 480V, 60 Hz stable
├── BAS alarm notifies facilities team (SMS + email)
├── All process equipment continues without interruption
├── When utility returns: ATS retransfers after 5-minute delay
│   (prevents rapid cycling on unstable utility)
└── Generator cools down 5 min, then returns to standby

UPS OVERLOAD OR FAULT:
├── UPS transfers to static bypass (no break, < 4 ms)
├── Alarm: audible + visual + SNMP trap
├── Load is on raw utility through bypass → still powered
├── Identify cause: overload? internal fault? battery issue?
├── If bypass also fails: maintenance bypass (manual, break-before-make)
└── NEVER work inside UPS without LOTO on input AND bypass

ARC FLASH / ELECTRICAL FIRE:
├── EVACUATE immediately — do NOT attempt to fight electrical fire
├── Pull emergency power off (EPO) button at room entrance
├── EPO shuts down UPS output + opens upstream breakers
├── Call 911 / facility emergency line
├── Clean-agent suppression system activates automatically
│   (FM-200 or Novec 1230 — safe for occupied spaces)
├── Do NOT re-energize without investigation and clearance
└── Document incident per OSHA 29 CFR 1910 / NFPA 70E

BATTERY FAILURE / THERMAL RUNAWAY:
├── UPS alarms on battery fault (cell failure, high temp)
├── If H₂ sensor alarms: ventilate immediately, no ignition sources
├── If thermal runaway (VRLA): evacuate battery room, close door
├── Clean-agent suppression may not be effective on battery fires
│   — dry chemical or CO₂ extinguisher for small fires only
├── Li-ion thermal runaway: water mist is accepted practice
└── Contact battery vendor emergency line for guidance